JPS6412678U - - Google Patents
Info
- Publication number
- JPS6412678U JPS6412678U JP10539287U JP10539287U JPS6412678U JP S6412678 U JPS6412678 U JP S6412678U JP 10539287 U JP10539287 U JP 10539287U JP 10539287 U JP10539287 U JP 10539287U JP S6412678 U JPS6412678 U JP S6412678U
- Authority
- JP
- Japan
- Prior art keywords
- spinner head
- substrate
- spinner
- utility
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 238000004528 spin coating Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 2
- 229920006254 polymer film Polymers 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10539287U JPS6412678U (en]) | 1987-07-10 | 1987-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10539287U JPS6412678U (en]) | 1987-07-10 | 1987-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6412678U true JPS6412678U (en]) | 1989-01-23 |
Family
ID=31337963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10539287U Pending JPS6412678U (en]) | 1987-07-10 | 1987-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6412678U (en]) |
-
1987
- 1987-07-10 JP JP10539287U patent/JPS6412678U/ja active Pending
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